====== UV Laser parameters ====== Please share your laser parameters with the group. It doesn't matter if you have different parameters for a material that is posted already, the parameters differ quite a lot depending on the optimization goal: A parameter set that gives fast and clean cuts through silicon might be unfeasable for hatching.\\ ===Wafer level materials=== ^ Material ^ hatch or cut? ^ thickness ^ Power ^ Velocity ^ Pulse frequency ^ hatch parameters or parallel lines ^ Repetitions ^ Project or comments ^ Name ^ | Silicon | cut | 300 µm | 100% | 10 mm/s | 20 kHz | 5 lines, 125 µm wide | 16 | fast cut | Brunne | | Silicon | hatch | 250 µm | 100% | 700 mm/s | 20 kHz | 8 hatches, 45° inc. 8µm spacing | 70 | low roughness | Brunne, Wiedenmann | | Silicon | cut | 500 µm | 100 % | 10 mm/s | 20 kHz | 7 Lines, 180µm wide | 16 | fast cut | Brunne | | Glass | cut | 1000 µm | 100% | 10 mm/s | 20 kHz | 0,5 mm width | 2? | Bluetape on top | Kamberger | | Glass | hatch | 550 µm | 100% | 100 mm/s | 20 kHz | 8 hatches, 45° inc. 8µm spacing | 15 | Hole through glass wafer, works only if the laser power is optimal! | Krausse | | Glass (wafer) | cut | 500 µm | 100 % | 30 mm/s | 20 kHz | 13 parallel lines, 0.25 mm width, 200% filling | 6 x on top, 18 x in 0.35 mm depth, 3 x in 0.6 mm depth | EAGLE 2 | Stürmer | | Cr/Au on glass wafer | cut | 500 nm | 100% | 800 mm/s | 70 kHz | Single line | 22 | Electrical circuits on glass | Krausse | | Cr/Au on glass wafer | hatch | 500 nm | 100% | 500 mm/s | 20 kHz | hatch StefanK_CrAu | 10 | Electrical circuits on glass | Krausse | | Pyrex | cut by hatch | 500 µm | | | | | | | Spengler | \\ ===Ceramics=== ^ Material ^ hatch or cut? ^ thickness ^ Power ^ Velocity ^ Pulse frequency ^ hatch parameters or parallel lines ^ Repetitions ^ Project or comments ^ Name ^ | PZT | cut | 200 µm | 100% | 200 mm/s | 40 kHz | 6 lines, 0,12 mm | 220 | monomorph piezo | Kamberger | | PZT | hatch | ?? | 100% | 700 mm/s | 20 kHz | | 11 | | Kamberger | | PZT | cut | 200 µm | 100% | 100 mm/s | 40 kHz | 6 lines, 0,12 mm | 220 | bimorph piezo, integrate short break between cycles for cooling | Kamberger | | PZT | cut | 120 µm | 100% | 100 mm/s | 20 kHz | Single line | 200 | MAXWELL, linear Axicon mirror | Brunne | | PZT Ekulit single layer | cut | ca. 120 µm | 100 % | 100 mm/s | 20 kHz | Single line | 150 | EAGLE 2 | Stürmer | | PZT Ekulit glued bimorph | cut | ca. 250 µm | 100 % | 100 mm/s | 20 kHz | 4 parallel lines, 0.1 mm width | 110 | EAGLE 2 | Stürmer | | ceramic | cut | 700 µm | 100% | 10 mm/s | 20 kHz | 20 lines, 0,5 mm | 120 | time: 25 minutes for 2mm circle | Wiedenmann | \\ ===Polymers=== ^ Material ^ hatch or cut? ^ thickness ^ Power ^ Velocity ^ Pulse frequency ^ hatch parameters or parallel lines ^ Repetitions ^ Project or comments ^ Name ^ | Kapton | cut | 120 µm | 100% | 170 mm/s | 25 kHz | single line | 18 | -- | Brunne, Gleißner | | Kapton | cut | 50 µm | 100% | 170 mm/s | 25 kHz | single line | 10 | Inkjet printed AgNP | Bollgrün | | SU-8 | hatch | 10 µm | 70% | 950 mm/s | 48 kHz | 2 hatches, 90° inc., 5 µm spacing | 1 | MAXWELL | Schöttler, Brunne | | Paper-base plastics | cut | 1 mm | 100% | 75 mm/s | 20 kHz | 5 lines, 125 µm wide | 25 | 3D Energy Harvester | Lausecker | | Paper-base plastics (FR2) | cut | 1 mm | 100% | 75 mm/s | 20 kHz | 5 lines, 125 µm spacing, defocus corrected! | 16 | MAXWELL | Brunne | | Paper-base plastics (FR2) | hatch | 635 µm | 100% | 100 mm/s | 20 kHz | 20µm spacing, 4 hatches | 3 | MAXWELL | Brunne | | Paper-base plastics | hatch | 235 | 100% | 150 mm/s | 20 kHz | 20µm spacing, 4 hatches | 2 | MAXWELL | Brunne | | unknown katheter polymer | hatch | 180 µm | 100% | 800 mm/s | 20 kHz | 4 hatches, 45° inc., 10 µm spacing | 2 | Katheter (hole for capacitor) | Wiedenmann | | Mylar | cut | 350 µm | 100% | 100 mm/s | 25 kHz | single line | 18 | for small parts insert 1s wait | Wapler | | Double-sided sticky foil | cut | 90 µm Tape (10 µm adhesive) | | | 20 kHz | single line | 2 | Transformer | Spengler | | PDMS | cut | 550µm | 100% | 50 mm/s | 20 kHz | 250µm trench, 10 parallel lines | 15 | MAXWELL | Brunne | \\ ===Metals=== ^ Material ^hatch or cut?^thickness^Power^Velocity^Pulse frequency^hatch parameters or parallel lines ^Repetitions^Project or comments^ Name ^ |Aluminum foil|cut|18µm|100%|10mm/s|20kHz|--|3|Microlev - cut through after 1 or 2 rep.|Brunne| | spring band steel | hatch | 150 µm | 100% | 20mm/s | 20 kHz | 8 hatches, 45° inc. 8µm spacing, no margin | 20 | Hole | Wiedenmann | | Steel sheet | cut | 120 µm | 100% | 10mm/s | 20 kHz | 3 parallel lines, 60 µm wide | 15 | "fast" cut, 0.21 mm/s | Brunne | \\ ===Particle filled polymers=== ^ Material ^hatch or cut?^thickness^Power^Velocity^Pulse frequency^hatch parameters or parallel lines ^Repetitions^Project or comments^ Name ^ | mPDMS | hatch | 300 µm |100% |150 mm/s| 25 kHz | 9 hatches, 220° inc., 25µm spacing | 1 | large hatch |Feser | | mPDMS | hatch | 300 µm |100% |75 mm/s | 20 kHz | 9 hatches, 220° inc., 25µm spacing | 1 | fine hatch |Feser | | cPDMS | cut | ~20 µm |100% |250 mm/s| 50 kHz | single line | 1 | cPDMS actuators |Brunne | \\ ===UV exposure of photoresists=== ^ Material ^hatch or cut?^thickness^Power^Velocity^Pulse frequency^hatch parameters or parallel lines ^Repetitions^Project or comments^ Name ^ | PCB | hatch | Standard PCB resist|5%|5 mm/s| 40 kHz | parallel lines, 30 µm spacing | 4-6 | ?? |?? |