UV Laser parameters
Please share your laser parameters with the group. It doesn't matter if you have different parameters for a material that is posted already, the parameters differ quite a lot depending on the optimization goal: A parameter set that gives fast and clean cuts through silicon might be unfeasable for hatching.
Wafer level materials
Material | hatch or cut? | thickness | Power | Velocity | Pulse frequency | hatch parameters or parallel lines | Repetitions | Project or comments | Name |
---|---|---|---|---|---|---|---|---|---|
Silicon | cut | 300 µm | 100% | 10 mm/s | 20 kHz | 5 lines, 125 µm wide | 16 | fast cut | Brunne |
Silicon | hatch | 250 µm | 100% | 700 mm/s | 20 kHz | 8 hatches, 45° inc. 8µm spacing | 70 | low roughness | Brunne, Wiedenmann |
Silicon | cut | 500 µm | 100 % | 10 mm/s | 20 kHz | 7 Lines, 180µm wide | 16 | fast cut | Brunne |
Glass | cut | 1000 µm | 100% | 10 mm/s | 20 kHz | 0,5 mm width | 2? | Bluetape on top | Kamberger |
Glass | hatch | 550 µm | 100% | 100 mm/s | 20 kHz | 8 hatches, 45° inc. 8µm spacing | 15 | Hole through glass wafer, works only if the laser power is optimal! | Krausse |
Glass (wafer) | cut | 500 µm | 100 % | 30 mm/s | 20 kHz | 13 parallel lines, 0.25 mm width, 200% filling | 6 x on top, 18 x in 0.35 mm depth, 3 x in 0.6 mm depth | EAGLE 2 | Stürmer |
Cr/Au on glass wafer | cut | 500 nm | 100% | 800 mm/s | 70 kHz | Single line | 22 | Electrical circuits on glass | Krausse |
Cr/Au on glass wafer | hatch | 500 nm | 100% | 500 mm/s | 20 kHz | hatch StefanK_CrAu | 10 | Electrical circuits on glass | Krausse |
Pyrex | cut by hatch | 500 µm | Spengler |
Ceramics
Material | hatch or cut? | thickness | Power | Velocity | Pulse frequency | hatch parameters or parallel lines | Repetitions | Project or comments | Name |
---|---|---|---|---|---|---|---|---|---|
PZT | cut | 200 µm | 100% | 200 mm/s | 40 kHz | 6 lines, 0,12 mm | 220 | monomorph piezo | Kamberger |
PZT | hatch | ?? | 100% | 700 mm/s | 20 kHz | 11 | Kamberger | ||
PZT | cut | 200 µm | 100% | 100 mm/s | 40 kHz | 6 lines, 0,12 mm | 220 | bimorph piezo, integrate short break between cycles for cooling | Kamberger |
PZT | cut | 120 µm | 100% | 100 mm/s | 20 kHz | Single line | 200 | MAXWELL, linear Axicon mirror | Brunne |
PZT Ekulit single layer | cut | ca. 120 µm | 100 % | 100 mm/s | 20 kHz | Single line | 150 | EAGLE 2 | Stürmer |
PZT Ekulit glued bimorph | cut | ca. 250 µm | 100 % | 100 mm/s | 20 kHz | 4 parallel lines, 0.1 mm width | 110 | EAGLE 2 | Stürmer |
ceramic | cut | 700 µm | 100% | 10 mm/s | 20 kHz | 20 lines, 0,5 mm | 120 | time: 25 minutes for 2mm circle | Wiedenmann |
Polymers
Material | hatch or cut? | thickness | Power | Velocity | Pulse frequency | hatch parameters or parallel lines | Repetitions | Project or comments | Name |
---|---|---|---|---|---|---|---|---|---|
Kapton | cut | 120 µm | 100% | 170 mm/s | 25 kHz | single line | 18 | – | Brunne, Gleißner |
Kapton | cut | 50 µm | 100% | 170 mm/s | 25 kHz | single line | 10 | Inkjet printed AgNP | Bollgrün |
SU-8 | hatch | 10 µm | 70% | 950 mm/s | 48 kHz | 2 hatches, 90° inc., 5 µm spacing | 1 | MAXWELL | Schöttler, Brunne |
Paper-base plastics | cut | 1 mm | 100% | 75 mm/s | 20 kHz | 5 lines, 125 µm wide | 25 | 3D Energy Harvester | Lausecker |
Paper-base plastics (FR2) | cut | 1 mm | 100% | 75 mm/s | 20 kHz | 5 lines, 125 µm spacing, defocus corrected! | 16 | MAXWELL | Brunne |
Paper-base plastics (FR2) | hatch | 635 µm | 100% | 100 mm/s | 20 kHz | 20µm spacing, 4 hatches | 3 | MAXWELL | Brunne |
Paper-base plastics | hatch | 235 | 100% | 150 mm/s | 20 kHz | 20µm spacing, 4 hatches | 2 | MAXWELL | Brunne |
unknown katheter polymer | hatch | 180 µm | 100% | 800 mm/s | 20 kHz | 4 hatches, 45° inc., 10 µm spacing | 2 | Katheter (hole for capacitor) | Wiedenmann |
Mylar | cut | 350 µm | 100% | 100 mm/s | 25 kHz | single line | 18 | for small parts insert 1s wait | Wapler |
Double-sided sticky foil | cut | 90 µm Tape (10 µm adhesive) | 20 kHz | single line | 2 | Transformer | Spengler | ||
PDMS | cut | 550µm | 100% | 50 mm/s | 20 kHz | 250µm trench, 10 parallel lines | 15 | MAXWELL | Brunne |
Metals
Material | hatch or cut? | thickness | Power | Velocity | Pulse frequency | hatch parameters or parallel lines | Repetitions | Project or comments | Name |
---|---|---|---|---|---|---|---|---|---|
Aluminum foil | cut | 18µm | 100% | 10mm/s | 20kHz | – | 3 | Microlev - cut through after 1 or 2 rep. | Brunne |
spring band steel | hatch | 150 µm | 100% | 20mm/s | 20 kHz | 8 hatches, 45° inc. 8µm spacing, no margin | 20 | Hole | Wiedenmann |
Steel sheet | cut | 120 µm | 100% | 10mm/s | 20 kHz | 3 parallel lines, 60 µm wide | 15 | “fast” cut, 0.21 mm/s | Brunne |
Particle filled polymers
Material | hatch or cut? | thickness | Power | Velocity | Pulse frequency | hatch parameters or parallel lines | Repetitions | Project or comments | Name |
---|---|---|---|---|---|---|---|---|---|
mPDMS | hatch | 300 µm | 100% | 150 mm/s | 25 kHz | 9 hatches, 220° inc., 25µm spacing | 1 | large hatch | Feser |
mPDMS | hatch | 300 µm | 100% | 75 mm/s | 20 kHz | 9 hatches, 220° inc., 25µm spacing | 1 | fine hatch | Feser |
cPDMS | cut | ~20 µm | 100% | 250 mm/s | 50 kHz | single line | 1 | cPDMS actuators | Brunne |
UV exposure of photoresists
Material | hatch or cut? | thickness | Power | Velocity | Pulse frequency | hatch parameters or parallel lines | Repetitions | Project or comments | Name |
---|---|---|---|---|---|---|---|---|---|
PCB | hatch | Standard PCB resist | 5% | 5 mm/s | 40 kHz | parallel lines, 30 µm spacing | 4-6 | ?? | ?? |